Polishing Particles for Semiconductors (CMP Slurry)

2021-09-15 11:01

Polishing Particles for Semiconductors (CMP Slurry)

Cerium oxide slurry controlling particles size at a nano-level

CMP Slurry used in semiconductor polishing processes boast a high removal rate despite their nano-particles size, and precisely control particle size distribution to greatly suppress scratches.